model |
MARU5000 / 5001 / 5002 / 5010 / 5011 / 5012 / 5020 / 5021 / 5022 / 5030 / 5031 / 5032 |
flow range (N2 Equivalent) |
5 sccm ~ 200 slm |
Flow Rate Control Range |
2 ~ 100% of Full Scale |
Accuracy |
≤± 1.0% of Reading Scale (25~100%), ≤± 0.25% of Full Scale (5~25%) |
Response Time |
< 1.0 second |
Linearity |
≤± 0.2% of Full Scale |
Repeatability |
≤± 0.15% of FUll Scale |
Normal Operating Pressure |
50~300 kPa(d) (5 sccm ~ 30 slm), 250~450 kPa(d) (30 slm ~ 200 slm) |
Maximum Operating Pressure |
300 kPa(g) (5 sccm ~ 30 slm), 450 kPa(g) (30 slm ~ 200 slm) |
Valve Shut Down |
< 0.01% of Full Scale (5 sccm ~ 30 slm), <0.1% of Full Scale (30 slm ~ 200 slm), |
Zero Stability |
≤± 0.5% Full Scale per year |
Temperature Coefficient |
0.01% Full Scale per °C |
Leak Integrity |
≤ 5 x 10-¹² Pa.m³/sec (He) |
Control Valve type |
Normally Closed Solenoid |
Seal type |
Metal Seal |
Digital Interface |
Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT |
Power Supply |
+15~24 VDC, 320mA max |
Operation Temperature |
5 ~50 °C (Recommended temperature range : 15~35 °C) |
Warm-up Time |
30 min (Accuracy Guaranteed : 60 min) |
Material |
STS-316L Electro-polished |
Pressure Insensitivity |
|
Display type |
Top mount integrated LCD (EtherCAT) |