TECHNOLOGY INNOVATION
PRODUCTS
MFC
MARU5000 series
Digital Mass Flow Controller
MARU5000 series
MARU5000 is Korea's first MFC for semiconductor manufacturing process.
Digital and thermal typed MFC and registered as Samsung Electronics Common Spec.
Digital and thermal typed MFC and registered as Samsung Electronics Common Spec.
FEATURES
- Standard Mass Flow Controller.
- Performance (response time & accuracy) equivalent to MARU7000 series.
- Strong corrosion resistance by electro polishing surface treatment.
- Digital Communications: Device NET, RS-485, Analog.
SPECIFICATIONS
| model | MARU5000 / 5001 / 5002 / 5010 / 5011 / 5012 / 5020 / 5021 / 5022 / 5030 / 5031 / 5032 |
|---|---|
| flow range (N2 Equivalent) | 5 sccm ~ 200 slm |
| Flow Rate Control Range | 2 ~ 100% of Full Scale |
| Accuracy | ≤± 1.0% of Reading Scale (25~100%), ≤± 0.25% of Full Scale (5~25%) |
| Response Time | < 1.0 second |
| Linearity | ≤± 0.2% of Full Scale |
| Repeatability | ≤± 0.15% of FUll Scale |
| Normal Operating Pressure | 50~300 kPa(d) (5 sccm ~ 30 slm), 250~450 kPa(d) (30 slm ~ 200 slm) |
| Maximum Operating Pressure | 300 kPa(g) (5 sccm ~ 30 slm), 450 kPa(g) (30 slm ~ 200 slm) |
| Valve Shut Down | < 0.01% of Full Scale (5 sccm ~ 30 slm), <0.1% of Full Scale (30 slm ~ 200 slm), |
| Zero Stability | ≤± 0.5% Full Scale per year |
| Temperature Coefficient | 0.01% Full Scale per °C |
| Leak Integrity | ≤ 5 x 10-¹² Pa.m³/sec (He) |
| Control Valve type | Normally Closed Solenoid |
| Seal type | Metal Seal |
| Digital Interface | Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT |
| Power Supply | +15~24 VDC, 320mA max |
| Operation Temperature | 5 ~50 °C (Recommended temperature range : 15~35 °C) |
| Warm-up Time | 30 min (Accuracy Guaranteed : 60 min) |
| Material | STS-316L Electro-polished |
| Pressure Insensitivity | |
| Display type | Top mount integrated LCD (EtherCAT) |
DIMENSIONS
