model |
MADEE5000s |
flow range (N2 Equivalent) |
10sccm ~ 50,000sccm (1channel range) |
Flow Rate Control Range |
0, 3 to 100% (1channel range) |
Accuracy |
≤± 1.0% of Reading Scale (3~25%), ≤± 2.0% of Set point (25~10%) |
Response Time |
≤ 3.0 second |
Linearity |
≤± 0.2% of Full Scale |
Repeatability |
≤± 0.15% of Full Scale |
Normal Operating Pressure |
|
Maximum Operating Pressure |
4psiA (200 Torr) / 1psiA (50 Torr)_Outlet pressure between Channel |
Valve Shut Down |
< 2.0% of Channel Full Scale at 500 Torr |
Zero Stability |
|
Temperature Coefficient |
|
Leak Integrity |
≤ 5 x 10-³ Pa.m³/sec (He) |
Control Valve type |
Normally Open type / Normmally Closed type |
Seal type |
Metal |
Digital Interface |
Analog 0~5 VDC / 4~20mA , Digital RS-485, D-Net, EtherCAT |
Power Supply |
+15~24 VDC, 400mA max |
Operation Temperature |
5 ~50 °C (Recommended temperature range : 15~35 °C) |
Warm-up Time |
30 min (Accuracy Guaranteed : 60 min) |
Material |
STS-316L Electro-polished |
Pressure Insensitivity |
|
Display type |
Top mount integrated LCD |