TECHNOLOGY INNOVATION
PRODUCTS
MFC
FRC
Flow Ratio Controller
FRC
- Real-time control of the flow rate across the FRC system after collecting flow information from the FRC Master on individual slave.
- Maintenance of the input set flow rate, regardeless of the ratio.
- Flow rate in proportion to the input is subject to output
- Maintenance of the input set flow rate, regardeless of the ratio.
- Flow rate in proportion to the input is subject to output
FEATURES
1. Control individual rates by distributing flow rates.
2. Flow classification control can be up to 6 channel
3. The flow ratio set value can be user controlled on each slave.
4. Digital Communications: EtherCAT, Device NET, RS-485, Analog.
2. Flow classification control can be up to 6 channel
3. The flow ratio set value can be user controlled on each slave.
4. Digital Communications: EtherCAT, Device NET, RS-485, Analog.
SPECIFICATIONS
| model | MADEE5000s |
|---|---|
| flow range (N2 Equivalent) | 10sccm ~ 50,000sccm (1channel range) |
| Flow Rate Control Range | 0, 3 to 100% (1channel range) |
| Accuracy | ≤± 1.0% of Reading Scale (3~25%), ≤± 2.0% of Set point (25~10%) |
| Response Time | ≤ 3.0 second |
| Linearity | ≤± 0.2% of Full Scale |
| Repeatability | ≤± 0.15% of Full Scale |
| Normal Operating Pressure | |
| Maximum Operating Pressure | 4psiA (200 Torr) / 1psiA (50 Torr)_Outlet pressure between Channel |
| Valve Shut Down | < 2.0% of Channel Full Scale at 500 Torr |
| Zero Stability | |
| Temperature Coefficient | |
| Leak Integrity | ≤ 5 x 10-³ Pa.m³/sec (He) |
| Control Valve type | Normally Open type / Normmally Closed type |
| Seal type | Metal |
| Digital Interface | Analog 0~5 VDC / 4~20mA , Digital RS-485, D-Net, EtherCAT |
| Power Supply | +15~24 VDC, 400mA max |
| Operation Temperature | 5 ~50 °C (Recommended temperature range : 15~35 °C) |
| Warm-up Time | 30 min (Accuracy Guaranteed : 60 min) |
| Material | STS-316L Electro-polished |
| Pressure Insensitivity | |
| Display type | Top mount integrated LCD |
DIMENSIONS
