TECHNOLOGY INNOVATION
PRODUCTS
MFC
MARU3000 series
Digital Mass Flow Controller
MARU3000 series
MARU3000 series is an entry model for the MKP, but its performance is super-normal. MKP tried hard to lower costs while maintaining performance for customer satisfaction, and the product is MARU3000 series.
Performance, such as the accuracy and response speed that MFC should have, is equivalent to the higher model. Equivalent to the higher-end MARU5000 series, it offers reasonable prices, and it is a supernormal with the factors that make it a bestseller.
Performance, such as the accuracy and response speed that MFC should have, is equivalent to the higher model. Equivalent to the higher-end MARU5000 series, it offers reasonable prices, and it is a supernormal with the factors that make it a bestseller.
FEATURES
- Entry Mass Flow Controller.
- This series has good performance compared to price.
- Strong corrosion resistance by bright annealing.
- Digital Communications: Device NET, RS-485, Analog.
SPECIFICATIONS
| model | MARU3000s / 3010s / 3020s/ 3030s / 3040s |
|---|---|
| flow range (N2 Equivalent) | 5 sccm ~ 500 slm |
| Flow Rate Control Range | 5 ~ 100% of Full Scale |
| Accuracy | ≤± 1.0% of Reading Scale (25~100%), ≤± 0.25% of Full Scale (5~25%) |
| Response Time | < 1.0 second |
| Linearity | ≤± 0.2% of Full Scale |
| Repeatability | ≤± 0.15% of FUll Scale |
| Normal Operating Pressure | 50~300 kPa(d)(5 sccm ~ 30 slm), 250~450 kPa(d)(30 slm ~ 200 slm), 300~550 kPa(d)(200 slm ~ 500 slm) |
| Maximum Operating Pressure | 300 kPa(g)(5 sccm ~ 30 slm), 450 kPa(g)(30 slm ~ 200 slm),450~550 kPa(g)(200 slm ~ 500 slm) |
| Valve Shut Down | < 1% of Full Scale |
| Zero Stability | ≤± 0.5% Full Scale per year |
| Temperature Coefficient | 0.01% Full Scale per °C |
| Leak Integrity | ≤ 5 x 10-¹² Pa.m³/sec (He) |
| Control Valve type | Normally Closed Solenoid |
| Seal type | Metal |
| Digital Interface | Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT |
| Power Supply | +15~24 VDC, 320mA max |
| Operation Temperature | 5 ~50 °C (Recommended temperature range : 15~35 °C) |
| Warm-up Time | 30 min (Accuracy Guaranteed : 60 min) |
| Material | STS-316L Bright annealing / Electro-polished (option) |
| Pressure Insensitivity | |
| Display type | Top mount integrated LCD (EtherCAT) |
DIMENSIONS
