model |
MARU3000s / 3010s / 3020s/ 3030s / 3040s |
flow range (N2 Equivalent) |
5 sccm ~ 500 slm |
Flow Rate Control Range |
5 ~ 100% of Full Scale |
Accuracy |
≤± 1.0% of Reading Scale (25~100%), ≤± 0.25% of Full Scale (5~25%) |
Response Time |
< 1.0 second |
Linearity |
≤± 0.2% of Full Scale |
Repeatability |
≤± 0.15% of FUll Scale |
Normal Operating Pressure |
50~300 kPa(d)(5 sccm ~ 30 slm), 250~450 kPa(d)(30 slm ~ 200 slm), 300~550 kPa(d)(200 slm ~ 500 slm) |
Maximum Operating Pressure |
300 kPa(g)(5 sccm ~ 30 slm), 450 kPa(g)(30 slm ~ 200 slm),450~550 kPa(g)(200 slm ~ 500 slm) |
Valve Shut Down |
< 1% of Full Scale |
Zero Stability |
≤± 0.5% Full Scale per year |
Temperature Coefficient |
0.01% Full Scale per °C |
Leak Integrity |
≤ 5 x 10-¹² Pa.m³/sec (He) |
Control Valve type |
Normally Closed Solenoid |
Seal type |
Metal |
Digital Interface |
Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT |
Power Supply |
+15~24 VDC, 320mA max |
Operation Temperature |
5 ~50 °C (Recommended temperature range : 15~35 °C) |
Warm-up Time |
30 min (Accuracy Guaranteed : 60 min) |
Material |
STS-316L Bright annealing / Electro-polished (option) |
Pressure Insensitivity |
|
Display type |
Top mount integrated LCD (EtherCAT) |