model | BARON3000 series |
---|---|
flow range (N2 Equivalent) | 30mTorr ~ 30Torr / 100sccm ~ 50,000sccm |
Flow Rate Control Range | 2 to 100% of Full scale |
Accuracy | 1Torr ~ 30Torr : 1.0% of Reading scale / 30mTorr ~ 1Torr : 1.0% of Full Scalce |
Response Time | ≤ 1.0 second |
Linearity | |
Repeatability | |
Normal Operating Pressure | 100sccm ~ 10slm, Min D.P : 20psi(D) / 10slm ~ 50slm, MIn D.P : 40psi(D) |
Maximum Operating Pressure | |
Valve Shut Down | Metal Valve 1% < of Full scale |
Zero Stability | |
Temperature Coefficient | Zero : ±0.05% of Full scale/℃ / Span : ±0.05% of Readlng scale/℃ |
Leak Integrity | ≤ 5 x 10-¹² Pa.m³/sec (He) |
Control Valve type | |
Seal type | Metal , PTFE |
Digital Interface | Analog 0~5 VDC / 4~20mA , Digital RS-485, D-Net, EtherCAT |
Power Supply | +15~24 VDC |
Operation Temperature | 5 ~50 °C (32 ~ 122 °F) |
Warm-up Time | |
Material | STS-316L Electro-polished |
Pressure Insensitivity | |
Display type | Top mount integrated LCD |