TECHNOLOGY INNOVATION
PRODUCTS
MFC
BARON3000 series
Digital Electronic Pressure Controller
BARON3000 series
Pressure can be adjusted and controlled remotly, without manually adusting the pressure at the site at regular intervals.
In addition, the pressure typically drops as the flow increases, which helps maintain the pressure set by the user.
In addition, the pressure typically drops as the flow increases, which helps maintain the pressure set by the user.
FEATURES
1. High response speed and accuaracy for pressure regulation control
2. Wide pressure control range
3. PID control for pressure control
4. Strong against moisture and particle
4. Digital Communications: EtherCAT, Device NET, RS-485, Analog.
2. Wide pressure control range
3. PID control for pressure control
4. Strong against moisture and particle
4. Digital Communications: EtherCAT, Device NET, RS-485, Analog.
SPECIFICATIONS
| model | BARON3000 series |
|---|---|
| flow range (N2 Equivalent) | 30mTorr ~ 30Torr / 100sccm ~ 50,000sccm |
| Flow Rate Control Range | 2 to 100% of Full scale |
| Accuracy | 1Torr ~ 30Torr : 1.0% of Reading scale / 30mTorr ~ 1Torr : 1.0% of Full Scalce |
| Response Time | ≤ 1.0 second |
| Linearity | |
| Repeatability | |
| Normal Operating Pressure | 100sccm ~ 10slm, Min D.P : 20psi(D) / 10slm ~ 50slm, MIn D.P : 40psi(D) |
| Maximum Operating Pressure | |
| Valve Shut Down | Metal Valve 1% < of Full scale |
| Zero Stability | |
| Temperature Coefficient | Zero : ±0.05% of Full scale/℃ / Span : ±0.05% of Readlng scale/℃ |
| Leak Integrity | ≤ 5 x 10-¹² Pa.m³/sec (He) |
| Control Valve type | |
| Seal type | Metal , PTFE |
| Digital Interface | Analog 0~5 VDC / 4~20mA , Digital RS-485, D-Net, EtherCAT |
| Power Supply | +15~24 VDC |
| Operation Temperature | 5 ~50 °C (32 ~ 122 °F) |
| Warm-up Time | |
| Material | STS-316L Electro-polished |
| Pressure Insensitivity | |
| Display type | Top mount integrated LCD |
DIMENSIONS
