TECHNOLOGY INNOVATION
PRODUCTS
MFC
MARU300 series
Digital Mass Flow Controller
SPECIFICATIONS
| model | MARU300s / 310s / 320s / 330s/ 340s |
|---|---|
| flow range (N2 Equivalent) | 5 sccm ~ 500 slm |
| Flow Rate Control Range | 5 ~ 100% of Full Scale |
| Accuracy | ≤± 1.0% of Reading Scale (35~100%), ≤± 0.5% of Full Scale (5~35%) |
| Response Time | ≤ 1.0 second |
| Linearity | ≤± 0.2% of Full Scale |
| Repeatability | ≤± 0.2% of Full Scale |
| Normal Operating Pressure | 50~300 kPa(d)(5 sccm ~ 30 slm), 250~450 kPa(d)(30 slm ~ 200 slm), 300~550 kPa(d)(200 slm ~ 500 slm) |
| Maximum Operating Pressure | 300 kPa(g)(5 sccm ~ 30 slm), 450 kPa(g)(30 slm ~ 200 slm),450~550 kPa(g)(200 slm ~ 500 slm) |
| Valve Shut Down | |
| Zero Stability | ≤± 0.5% Full Scale per year |
| Temperature Coefficient | 0.01% Full Scale per °C |
| Leak Integrity | ≤ 1 x 10-10 Pa.m³/sec (He) |
| Control Valve type | Normally Closed Solenoid |
| Seal type | PTFE |
| Digital Interface | Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT |
| Power Supply | +15~24 VDC, 320mA max |
| Operation Temperature | 5 ~50 °C (Recommended temperature range : 15~35 °C) |
| Warm-up Time | 30 min (Accuracy Guaranteed : 60 min) |
| Material | STS-316L |
| Pressure Insensitivity | |
| Display type | Top mount integrated 4 digit FND , LCD |
DIMENSIONS
