model |
MARU300s / 310s / 320s / 330s/ 340s |
flow range (N2 Equivalent) |
5 sccm ~ 500 slm |
Flow Rate Control Range |
5 ~ 100% of Full Scale |
Accuracy |
≤± 1.0% of Reading Scale (35~100%), ≤± 0.5% of Full Scale (5~35%) |
Response Time |
≤ 1.0 second |
Linearity |
≤± 0.2% of Full Scale |
Repeatability |
≤± 0.2% of Full Scale |
Normal Operating Pressure |
50~300 kPa(d)(5 sccm ~ 30 slm), 250~450 kPa(d)(30 slm ~ 200 slm), 300~550 kPa(d)(200 slm ~ 500 slm) |
Maximum Operating Pressure |
300 kPa(g)(5 sccm ~ 30 slm), 450 kPa(g)(30 slm ~ 200 slm),450~550 kPa(g)(200 slm ~ 500 slm) |
Valve Shut Down |
|
Zero Stability |
≤± 0.5% Full Scale per year |
Temperature Coefficient |
0.01% Full Scale per °C |
Leak Integrity |
≤ 1 x 10-10 Pa.m³/sec (He) |
Control Valve type |
Normally Closed Solenoid |
Seal type |
PTFE |
Digital Interface |
Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT |
Power Supply |
+15~24 VDC, 320mA max |
Operation Temperature |
5 ~50 °C (Recommended temperature range : 15~35 °C) |
Warm-up Time |
30 min (Accuracy Guaranteed : 60 min) |
Material |
STS-316L |
Pressure Insensitivity |
|
Display type |
Top mount integrated 4 digit FND , LCD |