model |
ARA300 / 301 / 302 / 310 / 311 / 312 / 320 / 321 / 322 / 330 / 331 / 332 |
flow range (N2 Equivalent) |
5 sccm ~ 200 slm |
Flow Rate Control Range |
2 ~ 100% of Full Scale |
Accuracy |
≤± 1.0% of Full Scale |
Response Time |
≤ 1.0 second |
Linearity |
≤± 0.2% of Full Scale |
Repeatability |
≤± 0.2% of Full Scale |
Normal Operating Pressure |
50~300 kPa (5 sccm ~ 30 slm), 250~450 kPa (30 slm ~ 200 slm) |
Maximum Operating Pressure |
300 kPa(5 sccm ~ 30 slm), 450 kPa(30 slm ~ 200 slm) |
Valve Shut Down |
< 0.01% of Full Scale (5 sccm ~ 30 slm), <0.1% of Full Scale (30 slm ~ 200 slm), |
Zero Stability |
≤± 0.5% Full Scale per year |
Temperature Coefficient |
0.01% Full Scale per °C |
Leak Integrity |
≤ 5 x 10-10 Pa.m³/sec (He) |
Control Valve type |
|
Seal type |
PTFE |
Digital Interface |
Analog 0~5 VDC, Digital RS-485, D-Net |
Power Supply |
+15~24 VDC, 320mA max@15VDC, 300mA max @24VDC |
Operation Temperature |
5 ~50 °C (Recommended temperature range : 15~35 °C) |
Warm-up Time |
30 min (Accuracy Guaranteed : 60 min) |
Material |
STS-316L |
Pressure Insensitivity |
|
Display type |
Top mount integrated 4 digit FND , LCD |