TECHNOLOGY INNOVATION
PRODUCTS
MFC
ARA300s
Digital Mass Flow Meter
SPECIFICATIONS
| model | ARA300 / 301 / 302 / 310 / 311 / 312 / 320 / 321 / 322 / 330 / 331 / 332 |
|---|---|
| flow range (N2 Equivalent) | 5 sccm ~ 200 slm |
| Flow Rate Control Range | 2 ~ 100% of Full Scale |
| Accuracy | ≤± 1.0% of Full Scale |
| Response Time | ≤ 1.0 second |
| Linearity | ≤± 0.2% of Full Scale |
| Repeatability | ≤± 0.2% of Full Scale |
| Normal Operating Pressure | 50~300 kPa (5 sccm ~ 30 slm), 250~450 kPa (30 slm ~ 200 slm) |
| Maximum Operating Pressure | 300 kPa(5 sccm ~ 30 slm), 450 kPa(30 slm ~ 200 slm) |
| Valve Shut Down | < 0.01% of Full Scale (5 sccm ~ 30 slm), <0.1% of Full Scale (30 slm ~ 200 slm), |
| Zero Stability | ≤± 0.5% Full Scale per year |
| Temperature Coefficient | 0.01% Full Scale per °C |
| Leak Integrity | ≤ 5 x 10-10 Pa.m³/sec (He) |
| Control Valve type | |
| Seal type | PTFE |
| Digital Interface | Analog 0~5 VDC, Digital RS-485, D-Net |
| Power Supply | +15~24 VDC, 320mA max@15VDC, 300mA max @24VDC |
| Operation Temperature | 5 ~50 °C (Recommended temperature range : 15~35 °C) |
| Warm-up Time | 30 min (Accuracy Guaranteed : 60 min) |
| Material | STS-316L |
| Pressure Insensitivity | |
| Display type | Top mount integrated 4 digit FND , LCD |
DIMENSIONS
