MARU9000 Series feature excellent linearity and accurate within ±0.5% of set point, which employ actual gas and rate - of- change verification method, front-end pressure and temperature compensation algorithm
* The table below is a specification table for the representative model, please refer to the catalog for details.
- Pressure Sensor based Mass Flow Controller (PS MFC)
- Ultra-fast response time (≤0.5sec)
- The highest accuracy in the MARU series (≤0.5% of Set point)
- Strong corrosion resistance by electro polishing surface treatment.
- Digital Communications: Device NET, RS-485, Analog.
- Can check various information about MFC by mounted LCD display.