TECHNOLOGY INNOVATION
PRODUCTS
MFC
MARU9000 series
Pressure based Mass Flow Controller
MARU9000 series
MARU9000 Series feature excellent linearity and accurate within ±0.5% of set point, which employ actual gas and rate - of- change verification method, front-end pressure and temperature compensation algorithm
* The table below is a specification table for the representative model, please refer to the catalog for details.
* The table below is a specification table for the representative model, please refer to the catalog for details.
FEATURES
- Pressure Sensor based Mass Flow Controller (PS MFC)
- Ultra-fast response time (≤0.5sec)
- The highest accuracy in the MARU series (≤0.5% of Set point)
- Strong corrosion resistance by electro polishing surface treatment.
- Digital Communications: Device NET, RS-485, Analog.
- Can check various information about MFC by mounted LCD display.
SPECIFICATIONS
| model | MARU9000s / 9010s |
|---|---|
| flow range (N2 Equivalent) | 5 sccm ~ 30 slm |
| Flow Rate Control Range | 0.5 ~ 100% of Full Scale |
| Accuracy | ≤± 1.0% of Reading Scale (10~100%), ≤± 0.1% of Full Scale (0.5~10%) |
| Response Time | ≤ 0.5 second |
| Linearity | ≤± 0.2% of Full Scale |
| Repeatability | ≤± 0.3% of Full Scale |
| Normal Operating Pressure | 35 ~ 80psig |
| Maximum Operating Pressure | 100 psig |
| Valve Shut Down | < 0.01% of Full Scale |
| Zero Stability | |
| Temperature Coefficient | ±1 °C (15 ~ 50 °C) |
| Leak Integrity | ≤ 5 x 10-¹² Pa.m³/sec (He) |
| Control Valve type | Normally Closed Solenoid |
| Seal type | Metal Seal |
| Digital Interface | Analog 0~5 VDC, Digital RS-485, D-Net, EtherCAT |
| Power Supply | +15~24 VDC, 300mA max |
| Operation Temperature | 5 ~50 °C (Recommended temperature range : 15~35 °C) |
| Warm-up Time | 30 min (Accuracy Guaranteed : 60 min) |
| Material | STS-316L Electro-polished |
| Pressure Insensitivity | ≤± 2% of F.S up/down to 5psi/sec |
| Display type | Top mount integrated LCD |
DIMENSIONS
